• DocumentCode
    2450024
  • Title

    Annealing-related conductivity conversion in lightly Fe-doped n-type InP wafers

  • Author

    Fornari, R. ; Zappettini, A. ; Gombia, E. ; Mosca, R. ; Curti, M.

  • Author_Institution
    Istituto MASPEC, CNR, Parma, Italy
  • fYear
    1996
  • fDate
    29 Apr-3 May 1996
  • Firstpage
    9
  • Lastpage
    12
  • Abstract
    As-grown semiconducting InP wafers containing iron at a level between 5 and 8×1015 cm-3 were seen to convert to semi-insulating, with high resistivity and good mobility, after a thermal treatment at 900°C. This fact is interesting since it allows the preparation of semi-insulating InP with Fe content substantially lower than in standard LEC material. In this paper we report the annealing parameters and the results of an extensive electro-optical characterization of the treated samples. The experimental results suggest that the conductivity drop is mainly due to a considerable loss of shallow donors
  • Keywords
    III-V semiconductors; annealing; carrier mobility; electrical resistivity; indium compounds; iron; semiconductor doping; semiconductor materials; 900 C; InP:Fe; annealing-related conductivity conversion; good mobility; high resistivity; lightly Fe-doped n-type InP wafers; Annealing; Contamination; Crystals; Current measurement; Doping profiles; Indium phosphide; Iron; Semiconductivity; Substrates; Thermal conductivity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconducting and Semi-Insulating Materials Conference, 1996. IEEE
  • Conference_Location
    Toulouse
  • Print_ISBN
    0-7803-3179-6
  • Type

    conf

  • DOI
    10.1109/SIM.1996.570865
  • Filename
    570865