Title :
Characterization of conductor-backed coplanar waveguide using accurate on-wafer measurement techniques
Author :
Shih, Y.-C. ; Maher, M.
Author_Institution :
Hughes Aircraft Co., Torrance, CA, USA
Abstract :
The conductor-backed coplanar waveguide has been experimentally characterized using accurate on-wafer S-parameter measurement techniques. An uncertainty analysis was conducted to quantify the measurement errors. The measured characteristic impedance, effective dielectric constant, and attenuation constant are in good agreement with the theory.<>
Keywords :
MMIC; S-parameters; electric impedance measurement; integrated circuit testing; measurement errors; microwave measurement; permittivity measurement; waveguides; CPW; MMIC application; S-parameter measurement techniques; attenuation constant; characteristic impedance; conductor-backed coplanar waveguide; effective dielectric constant; measurement errors; on-wafer measurement techniques; scattering parameters; uncertainty analysis; Coplanar waveguides; Electrooptical waveguides; Impedance; Measurement errors; Measurement techniques; Probes; Scattering parameters; Testing; Transmission lines; Uncertainty;
Conference_Titel :
Microwave Symposium Digest, 1990., IEEE MTT-S International
Conference_Location :
Dallas, TX
DOI :
10.1109/MWSYM.1990.99778
