Title :
High precision and non obtrusive displacement measurement sensor for intelligent robots and systems
Author :
Jourlin, Y. ; Parriaux, O. ; Pigeon, F.
Author_Institution :
Lab. TSI, Univ. Jean Monnet, Saint-Etienne, France
Abstract :
High resolution sensors based on the principle of diffractive interferometry can be miniaturized to a point where they can be used in robots and small electro-mechanical systems. A possible sensing configuration with related grating technology is demonstrated in the form of a compatible prototype capable of using a dedicated OptoASIC.
Keywords :
application specific integrated circuits; displacement measurement; light interferometry; microsensors; optical sensors; robots; dedicated OptoASIC; diffractive interferometry; grating technology; high precision displacement measurement sensor; high resolution sensors; intelligent robots; sensing configuration; small electro-mechanical systems; Diffraction gratings; Displacement measurement; Intelligent robots; Intelligent sensors; Optical diffraction; Optical distortion; Optical interferometry; Optical sensors; Robot sensing systems; Sensor systems;
Conference_Titel :
Emerging Technologies and Factory Automation, 2001. Proceedings. 2001 8th IEEE International Conference on
Conference_Location :
Antibes-Juan les Pins, France
Print_ISBN :
0-7803-7241-7
DOI :
10.1109/ETFA.2001.997781
