A micromechanical focusing device for artificial vision

Author

Gallois-pichonat, Emmanuelle ; Jeannot, Jean-Claude ; de Labachelerie, Michel

Author_Institution

LPMO/CNRS, Besancon, France

Volume

2

fYear

2001

fDate

15-18 Oct. 2001

Firstpage

787

Abstract

The design, fabrication and measured characteristics of a bulk-micromachined focusing device are presented. A micro-bench is formed by 2 V-grooves which support an optical fiber and a micro-lens. A thermal actuator is integrated in the optical bench, and allows a micro-lens to be moved along the optical axis in order to adjust longitudinally its focusing spot. This device can be used for vision systems such as robotic vision or confocal microscopy. The focusing range can be adjusted between 50 mm and infinity with a 15 mA supply current.

Keywords

gradient index optics; microactuators; microlenses; micromachining; optical fabrication; 15 mA; artificial vision; confocal microscopy; focusing range; focusing spot; micro-bench; micro-lens; microactuator; micromechanical focusing device; optical axis; optical fiber; robotic vision; silicon micromachining; thermal actuator; vision systems; Actuators; Current supplies; H infinity control; Integrated optics; Machine vision; Micromechanical devices; Microscopy; Optical device fabrication; Optical fibers; Robot vision systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Emerging Technologies and Factory Automation, 2001. Proceedings. 2001 8th IEEE International Conference on

Conference_Location

Antibes-Juan les Pins, France

Print_ISBN

0-7803-7241-7

Type

conf

DOI

10.1109/ETFA.2001.997783

Filename

997783