Title :
Design of an autonomous micro robot
Author :
Basset, Philippe ; Buchaillot, Lionel ; Kaiser, Andreas ; Collard, Dominique
Author_Institution :
UMR/CNRS 8520, Lille, France
Abstract :
The design of a wireless micro-robot is investigated. The robot consists of a distributed ciliary micro-motion system with electrostatic actuation. Two new types of 150/spl times/100 /spl mu/m/sup 2/ actuators have been fabricated thanks to a three-level polysilicon process. Remote powering is achieved by inductive coupling at 13.56 MHz. A simple analytical model for the inductive coupling is developed. A 24-/spl mu/m thick electroplated gold antenna has been optimized, then fabricated on an epoxy film in order to obtain a light component supported by the robot. Electronics for the transceiver and the robot control are also presented.
Keywords :
antennas; electromagnetic induction; electrostatic actuators; industrial robots; microrobots; mobile robots; power supplies to apparatus; power transmission; transceivers; 100 micron; 13.56 MHz; 150 micron; 24 micron; actuator fabrication; analytical model; autonomous wireless micro-robot; distributed ciliary micro-motion system; electroplated Au antenna optimization; electrostatic actuation; epoxy film; inductive coupling; light component; polycrystalline Si process; remote powering; robot control electronics; transceiver electronics; Coils; Couplings; Gold; Magnetic fields; Receiving antennas; Robots; Transmitters; Transmitting antennas; Voltage; Wire;
Conference_Titel :
Emerging Technologies and Factory Automation, 2001. Proceedings. 2001 8th IEEE International Conference on
Conference_Location :
Antibes-Juan les Pins, France
Print_ISBN :
0-7803-7241-7
DOI :
10.1109/ETFA.2001.997785
