DocumentCode
2450453
Title
A SAW Junction Interdigital Transducer in Silicon
Author
Venema, A. ; Wolsheimer, E.A.
fYear
1982
fDate
27-29 Oct. 1982
Firstpage
461
Lastpage
465
Keywords
Acoustic transducers; Electrodes; Epitaxial layers; Piezoelectric transducers; Silicon; Substrates; Surface acoustic waves; Ultrasonic transducers; Voltage; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
1982 Ultrasonics Symposium
Conference_Location
San Diego, CA, USA
Type
conf
DOI
10.1109/ULTSYM.1982.197869
Filename
1534809
Link To Document