DocumentCode :
2450453
Title :
A SAW Junction Interdigital Transducer in Silicon
Author :
Venema, A. ; Wolsheimer, E.A.
fYear :
1982
fDate :
27-29 Oct. 1982
Firstpage :
461
Lastpage :
465
Keywords :
Acoustic transducers; Electrodes; Epitaxial layers; Piezoelectric transducers; Silicon; Substrates; Surface acoustic waves; Ultrasonic transducers; Voltage; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1982 Ultrasonics Symposium
Conference_Location :
San Diego, CA, USA
Type :
conf
DOI :
10.1109/ULTSYM.1982.197869
Filename :
1534809
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2450453
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