DocumentCode
2450471
Title
Thin Film Resonators and Filters
Author
Lakin, K. bl ; Wang, J. ; Kline, G.R. ; Landin, A.R. ; Chen, Y.Y. ; Hunt, J.D.
fYear
1982
fDate
27-29 Oct. 1982
Firstpage
466
Lastpage
475
Keywords
Active filters; Integrated circuit technology; Microelectronics; Piezoelectric films; Resonator filters; Semiconductor thin films; Substrates; Thin film circuits; Thin film devices; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
1982 Ultrasonics Symposium
Conference_Location
San Diego, CA, USA
Type
conf
DOI
10.1109/ULTSYM.1982.197870
Filename
1534810
Link To Document