DocumentCode :
2450471
Title :
Thin Film Resonators and Filters
Author :
Lakin, K. bl ; Wang, J. ; Kline, G.R. ; Landin, A.R. ; Chen, Y.Y. ; Hunt, J.D.
fYear :
1982
fDate :
27-29 Oct. 1982
Firstpage :
466
Lastpage :
475
Keywords :
Active filters; Integrated circuit technology; Microelectronics; Piezoelectric films; Resonator filters; Semiconductor thin films; Substrates; Thin film circuits; Thin film devices; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1982 Ultrasonics Symposium
Conference_Location :
San Diego, CA, USA
Type :
conf
DOI :
10.1109/ULTSYM.1982.197870
Filename :
1534810
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2450471
