Title :
Spurious Resonances in Bulk Acoustic Wave Resonators
Author :
Yoo, K.B. ; Überall, H. ; Williams, W., Jr.
Keywords :
Acoustic devices; Acoustic waves; Electrodes; Etching; Frequency; Physics; Resonance; Resonator filters; Silicon; Zinc oxide;
Conference_Titel :
1982 Ultrasonics Symposium
Conference_Location :
San Diego, CA, USA
DOI :
10.1109/ULTSYM.1982.197874
