Title :
Thin-Film Electret and Condenser Ultrasonic Transducers
Author :
Bernstein, J.J. ; White, R.M.
Keywords :
Acoustic transducers; Air gaps; Aluminum; Copper; Electrets; Electrodes; Piezoelectric films; Piezoelectric transducers; Transistors; Ultrasonic transducers;
Conference_Titel :
1982 Ultrasonics Symposium
Conference_Location :
San Diego, CA, USA
DOI :
10.1109/ULTSYM.1982.197882