Title :
Audio-Frequency Characteristics of a Piezoelectric Speaker Using an AlN Film Deposited on a Polymer or Metal Membrane
Author :
Shiosaki, Tadashi ; Hayashi, Muneo ; Kawabata, Akira
Keywords :
Aluminum; Biomembranes; Electrodes; Piezoelectric films; Polymer films; Semiconductor films; Steel; Substrates; X-ray diffraction; Zinc oxide;
Conference_Titel :
1982 Ultrasonics Symposium
Conference_Location :
San Diego, CA, USA
DOI :
10.1109/ULTSYM.1982.197883
