Audio-Frequency Characteristics of a Piezoelectric Speaker Using an AlN Film Deposited on a Polymer or Metal Membrane

Author

Shiosaki, Tadashi ; Hayashi, Muneo ; Kawabata, Akira

fYear

1982

fDate

27-29 Oct. 1982

Firstpage

529

Lastpage

532

Keywords

Aluminum; Biomembranes; Electrodes; Piezoelectric films; Polymer films; Semiconductor films; Steel; Substrates; X-ray diffraction; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

1982 Ultrasonics Symposium

Conference_Location

San Diego, CA, USA

Type

DOI

10.1109/ULTSYM.1982.197883

Filename

1534823

Link To Document