Optimization issues regarding microcantilever design and fabrication

The paper is dedicated to a cantilever sensor design/fabrication optimization which is related to a no curved structure, before bimolecular functionalization and immobilization. The advantage of cantilever arrays is not only their small size but also their suitability for mass production, which permits economically realistic, disposable sensors. The simulations of the cantilever in the static mode have been performed in order to evaluate the sensitivity of the device at very low mass loading (ng). The simulations/fabrication had the role to optimize the dimensions of the cantilevers in order to obtain a stress free structure, able to be functionalized and to bent when biomolecules bond. Also, SEM, Interferometer measurements were made in order to characterize the microstructures.