Title :
A mesh generation algorithm for complex geometry [semiconductor process modelling]
Author :
Yoon, Sangho ; Kwon, Ohseob ; Yoon, Sukin ; Jung, Hyunsu ; Won, Taeyoung
Author_Institution :
Div. of Electr. & Comput. Eng., Inha Univ., Inchun, South Korea
Abstract :
A mesh generation algorithm for a curved surface is proposed to investigate a complex structure on a semiconductor substrate. This algorithm relies on the advancing front method with scattered data interpolation through a NURBS (nonuniform rational B-spline) surface. This algorithm has been applied to a cell-based simulation and a level set simulation. The NURBS mesh according to our algorithm excellently represented the surface evolution of the topography
Keywords :
interpolation; mesh generation; semiconductor process modelling; splines (mathematics); surface topography; NURBS mesh; NURBS surface; advancing front method; cell-based simulation; complex geometry; curved surface; level set simulation; mesh generation algorithm; nonuniform rational B-spline surface; scattered data interpolation; semiconductor process modelling; semiconductor substrate; surface topography evolution; Geometry; Interpolation; Level set; Mesh generation; Scattering; Smoothing methods; Spline; Substrates; Surface reconstruction; Surface topography;
Conference_Titel :
Simulation of Semiconductor Processes and Devices, 2000. SISPAD 2000. 2000 International Conference on
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-6279-9
DOI :
10.1109/SISPAD.2000.871247
