Title :
Monte Carlo simulation of current fluctuation at actual contact
Author :
Matsuzawa, K. ; Sano, N. ; Natori, K. ; Mukai, M. ; Nakayama, N.
Author_Institution :
Adv. LSI Technol. Lab., Toshiba Corp., Yokohama, Japan
Abstract :
Current fluctuation at an actual contact was studied using the Monte Carlo method. The metal/semiconductor interface was treated as the Schottky contact, because the interface inevitably becomes the Schottky contact. Simulations were carried out for n+n structures to investigate asymmetry of current fluctuation at both contacts. It was found that the current fluctuation at each contact depended on bias, impurity concentration around the contact, length of contact region, and the Schottky barrier height
Keywords :
Monte Carlo methods; Schottky barriers; current fluctuations; impurity distribution; semiconductor device models; semiconductor-metal boundaries; Monte Carlo method; Monte Carlo simulation; Schottky barrier height; Schottky contact; contact bias; contact current fluctuation; contact region length; current fluctuation; current fluctuation asymmetry; impurity concentration; metal/semiconductor interface; n+n structures; Anodes; Cathodes; Fluctuations; Laboratories; Large scale integration; Schottky barriers; Semiconductor impurities; Silicon devices; Tunneling; Voltage;
Conference_Titel :
Simulation of Semiconductor Processes and Devices, 2000. SISPAD 2000. 2000 International Conference on
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-6279-9
DOI :
10.1109/SISPAD.2000.871251