Angstrom positioning system using a giant magnetostriction actuator for high power applications

In this paper, an angstrom order positioning system using a giant magnetostriction actuator is proposed and developed. This newly developed system can precisely control several Å positioning over several μm stroke range for practical use. This system can also deliver high power output to move payload ranging from several gf to several tons. Moreover, this system has achieved state-of-the-art backlash free positioning by using the newly developed elastic displacement table and a newly developed giant magnetostriction actuator