DocumentCode
2452063
Title
Angstrom positioning system using a giant magnetostriction actuator for high power applications
Author
Nakano, Hirotami
Author_Institution
Dept. of Syst. Eng., Ibaraki Univ., Japan
Volume
3
fYear
2002
fDate
2002
Firstpage
1102
Abstract
In this paper, an angstrom order positioning system using a giant magnetostriction actuator is proposed and developed. This newly developed system can precisely control several Å positioning over several μm stroke range for practical use. This system can also deliver high power output to move payload ranging from several gf to several tons. Moreover, this system has achieved state-of-the-art backlash free positioning by using the newly developed elastic displacement table and a newly developed giant magnetostriction actuator
Keywords
electric actuators; electric current control; magnetostrictive devices; position control; angstrom order positioning system; backlash free positioning; current control; elastic displacement table; giant magnetostriction actuator; high power output; payload moving; position control; state-of-the-art positioning; Actuators; Capacitive sensors; Control systems; Displacement control; Magnetic sensors; Magnetostriction; Payloads; Power amplifiers; Proportional control; Signal generators;
fLanguage
English
Publisher
ieee
Conference_Titel
Power Conversion Conference, 2002. PCC-Osaka 2002. Proceedings of the
Conference_Location
Osaka
Print_ISBN
0-7803-7156-9
Type
conf
DOI
10.1109/PCC.2002.998126
Filename
998126
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