Title :
Low constant flying height on silicon planar heads
Author :
Dominiak-Leti, M. ; Fedeli, J.M. ; Lazzari, J.P.
Author_Institution :
commissariat a I´Energie Atomique
Keywords :
Assembly; Design optimization; Drives; Etching; Geometry; Microelectronics; Rails; Shape; Silicon; Stability;
Conference_Titel :
Magnetics Conference, 1992. Digests of Intermag '92., International
Conference_Location :
St. Louis, MO, USA
Print_ISBN :
0-7803-0637-6
DOI :
10.1109/INTMAG.1992.696501
