DocumentCode
2453951
Title
Stress Relaxation in Triode Sputtered Zinc Oxide Films
Author
Hickernell, F.S. ; Hickernell, F.S.
fYear
1983
fDate
Oct. 31 1983-Nov. 2 1983
Firstpage
311
Lastpage
315
Keywords
Internal stresses; Optical devices; Optical films; Optical refraction; Optical surface waves; Optical variables control; Substrates; Temperature; Thermal stresses; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
1983 Ultrasonics Symposium
Conference_Location
Atlanta, GA, USA
Type
conf
DOI
10.1109/ULTSYM.1983.198064
Filename
1535004
Link To Document