• DocumentCode
    2454092
  • Title

    Zinc Oxide Channel Waveguide Formation on Etched Rectangular Ridge Structures

  • Author

    Hickernell, F.S. ; Cho, F.Y. ; Richard, F.V. ; Hickernell, T.S.

  • fYear
    1983
  • fDate
    Oct. 31 1983-Nov. 2 1983
  • Firstpage
    353
  • Lastpage
    356
  • Keywords
    Optical films; Optical losses; Optical propagation; Optical waveguides; Plasma applications; Plasma chemistry; Propagation losses; Rectangular waveguides; Sputter etching; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    1983 Ultrasonics Symposium
  • Conference_Location
    Atlanta, GA, USA
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1983.198074
  • Filename
    1535014
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2454092