Title :
Zinc Oxide Channel Waveguide Formation on Etched Rectangular Ridge Structures
Author :
Hickernell, F.S. ; Cho, F.Y. ; Richard, F.V. ; Hickernell, T.S.
fDate :
Oct. 31 1983-Nov. 2 1983
Keywords :
Optical films; Optical losses; Optical propagation; Optical waveguides; Plasma applications; Plasma chemistry; Propagation losses; Rectangular waveguides; Sputter etching; Zinc oxide;
Conference_Titel :
1983 Ultrasonics Symposium
Conference_Location :
Atlanta, GA, USA
DOI :
10.1109/ULTSYM.1983.198074
