Preparation of Ti-TiNx-TiOx/Cu solar selective absorbing thin films by magnetron sputtering

Author

He, Xisheng ; Peng, Huiqing ; Wang, Jianqiang

Author_Institution

Sch. of Resources & Environ. Eng., Wuhan Univ. of Technol., Wuhan, China

fYear

2011

fDate

24-26 June 2011

Firstpage

3338

Lastpage

3340

Abstract

The Ti-TiN_x-TiO_x/Cu thin films were prepared by D.C. magnetron sputtering on copper substrates. The N₂ flow rate, the working current, and the substrate-to-target influences were discussed. The reflectance, optical constant (n&k) and thickness of the thin films were measured by spectrophotometer, n&k Analyzer and step apparatus. The Ti-TiN-TiO_x/Cu thin film was 150nm thick, and with the property of α=0.90, ε=0.06, α/ε 15.05 and a blue appearance.

Keywords

copper; optical constants; spectrophotometers; sputter deposition; thin films; titanium; titanium compounds; DC magnetron sputtering; Ti-TiN_x-TiO_x-Cu; copper substrates; n&k Analyzer; nitrogen flow rate; optical constant; reflectance; size 150 nm; solar selective absorbing thin films; spectrophotometer; step apparatus; substrate-to-target influences; Absorption; Copper; Optical films; Optical reflection; Reflectivity; Substrates; Magnetron sputtering; Solar selective absorbing thin films; Ti-TiNx-TiOx/Cu;

fLanguage

English

Publisher

ieee

Conference_Titel

Remote Sensing, Environment and Transportation Engineering (RSETE), 2011 International Conference on

Conference_Location

Nanjing

Print_ISBN

978-1-4244-9172-8

Type

conf

DOI

10.1109/RSETE.2011.5965027

Filename

5965027