Title :
Preparation of Ti-TiNx-TiOx/Cu solar selective absorbing thin films by magnetron sputtering
Author :
He, Xisheng ; Peng, Huiqing ; Wang, Jianqiang
Author_Institution :
Sch. of Resources & Environ. Eng., Wuhan Univ. of Technol., Wuhan, China
Abstract :
The Ti-TiNx-TiOx/Cu thin films were prepared by D.C. magnetron sputtering on copper substrates. The N2 flow rate, the working current, and the substrate-to-target influences were discussed. The reflectance, optical constant (n&k) and thickness of the thin films were measured by spectrophotometer, n&k Analyzer and step apparatus. The Ti-TiN-TiOx/Cu thin film was 150nm thick, and with the property of α=0.90, ε=0.06, α/ε 15.05 and a blue appearance.
Keywords :
copper; optical constants; spectrophotometers; sputter deposition; thin films; titanium; titanium compounds; DC magnetron sputtering; Ti-TiNx-TiOx-Cu; copper substrates; n&k Analyzer; nitrogen flow rate; optical constant; reflectance; size 150 nm; solar selective absorbing thin films; spectrophotometer; step apparatus; substrate-to-target influences; Absorption; Copper; Optical films; Optical reflection; Reflectivity; Substrates; Magnetron sputtering; Solar selective absorbing thin films; Ti-TiNx-TiOx/Cu;
Conference_Titel :
Remote Sensing, Environment and Transportation Engineering (RSETE), 2011 International Conference on
Conference_Location :
Nanjing
Print_ISBN :
978-1-4244-9172-8
DOI :
10.1109/RSETE.2011.5965027
