DocumentCode :
2454602
Title :
Composite Thin Film UHF Bulk Acoustic Wave Resonators on GaAs
Author :
Kline, G.R. ; Lakin, K.M.
fYear :
1983
fDate :
Oct. 31 1983-Nov. 2 1983
Firstpage :
495
Lastpage :
497
Keywords :
Acoustic waves; Etching; Gallium arsenide; Piezoelectric films; Piezoelectric materials; Resonance; Sputtering; Substrates; Temperature measurement; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1983 Ultrasonics Symposium
Conference_Location :
Atlanta, GA, USA
Type :
conf
DOI :
10.1109/ULTSYM.1983.198103
Filename :
1535043
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2454602
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