Title :
Effect of Mesa-Shaping on Spurious Modes in ZnO/Si Bulk-Wave Composite Resonators
Author :
Milsom, R.F. ; Curran, J.E. ; Murray, S.L. ; Terry-Wood, S. ; Redwood, M.
fDate :
Oct. 31 1983-Nov. 2 1983
Keywords :
Admittance; Biomembranes; Electrodes; Frequency; Piezoelectric films; Predictive models; Semiconductor films; Silicon; Tellurium; Zinc oxide;
Conference_Titel :
1983 Ultrasonics Symposium
Conference_Location :
Atlanta, GA, USA
DOI :
10.1109/ULTSYM.1983.198104
