DocumentCode
2454731
Title
Effect of RF Bias on Sputter Deposited ZnO Films for Shear Mode Transducers
Author
Krishnaswamy, S.V. ; McAvoy, B.R. ; Moore, R.A.
fYear
1983
fDate
Oct. 31 1983-Nov. 2 1983
Firstpage
531
Lastpage
534
Keywords
Acoustic waves; Diodes; Indium tin oxide; Microwave generation; Radio frequency; Sputtering; Substrates; Surface acoustic wave devices; Transducers; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
1983 Ultrasonics Symposium
Conference_Location
Atlanta, GA, USA
Type
conf
DOI
10.1109/ULTSYM.1983.198111
Filename
1535051
Link To Document