DocumentCode :
2454731
Title :
Effect of RF Bias on Sputter Deposited ZnO Films for Shear Mode Transducers
Author :
Krishnaswamy, S.V. ; McAvoy, B.R. ; Moore, R.A.
fYear :
1983
fDate :
Oct. 31 1983-Nov. 2 1983
Firstpage :
531
Lastpage :
534
Keywords :
Acoustic waves; Diodes; Indium tin oxide; Microwave generation; Radio frequency; Sputtering; Substrates; Surface acoustic wave devices; Transducers; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1983 Ultrasonics Symposium
Conference_Location :
Atlanta, GA, USA
Type :
conf
DOI :
10.1109/ULTSYM.1983.198111
Filename :
1535051
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2454731
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