DocumentCode
2455227
Title
Concentration Dependence of Thermal-Wave Contrast for Dopants in Silicon
Author
Holland, S. ; White, R.M.
fYear
1983
fDate
Oct. 31 1983-Nov. 2 1983
Firstpage
681
Lastpage
684
Keywords
Acoustic scattering; Computer displays; Electron beams; Lattices; Photothermal effects; Scanning electron microscopy; Silicon; Solids; Thermal conductivity; Thermal engineering;
fLanguage
English
Publisher
ieee
Conference_Titel
1983 Ultrasonics Symposium
Conference_Location
Atlanta, GA, USA
Type
conf
DOI
10.1109/ULTSYM.1983.198144
Filename
1535084
Link To Document