Title :
Concentration Dependence of Thermal-Wave Contrast for Dopants in Silicon
Author :
Holland, S. ; White, R.M.
fDate :
Oct. 31 1983-Nov. 2 1983
Keywords :
Acoustic scattering; Computer displays; Electron beams; Lattices; Photothermal effects; Scanning electron microscopy; Silicon; Solids; Thermal conductivity; Thermal engineering;
Conference_Titel :
1983 Ultrasonics Symposium
Conference_Location :
Atlanta, GA, USA
DOI :
10.1109/ULTSYM.1983.198144
