Title : 
CMOS technology roadmap projection including parasitic effects
         
        
            Author : 
Wei, Lan ; Boeuf, Frédéric ; Skotnicki, Thomas ; Wong, H. S Philip
         
        
            Author_Institution : 
Stanford Univ., Stanford, CA, USA
         
        
        
        
        
        
            Abstract : 
In this paper, we revisit the Si CMOS roadmap projection by taking into consideration the parasitic capacitances, which significantly affect the device performance beyond 32 nm technology. Capacitance components are analytically modeled and different design rules are examined.
         
        
            Keywords : 
CMOS integrated circuits; integrated circuit modelling; CMOS technology roadmap projection; Si; parasitic capacitance modelling; parasitic effects; Boosting; CMOS technology; Delay estimation; Integrated circuit interconnections; Inverters; Logic devices; MOS devices; Parasitic capacitance; Semiconductor device modeling; Switches;
         
        
        
        
            Conference_Titel : 
VLSI Technology, Systems, and Applications, 2009. VLSI-TSA '09. International Symposium on
         
        
            Conference_Location : 
Hsinchu
         
        
        
            Print_ISBN : 
978-1-4244-2784-0
         
        
            Electronic_ISBN : 
1524-766X
         
        
        
            DOI : 
10.1109/VTSA.2009.5159299