Photoacoustic Measurements of Nonradiative Lifetime and Defect in Silicon Wafers

Author

Mikoshiba, N. ; Nakamura, H. ; Tsubouchi, K.

fYear

1983

fDate

Oct. 31 1983-Nov. 2 1983

Firstpage

685

Lastpage

690

Keywords

Microscopy; Optical surface waves; Oxidation; Radiative recombination; Silicon; Stacking; Surface topography; Temperature; Transducers; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

1983 Ultrasonics Symposium

Conference_Location

Atlanta, GA, USA

Type

DOI

10.1109/ULTSYM.1983.198145

Filename

1535085

Link To Document