Integrated circuit failure detection using IR laser

Author

Keenan, Ernest ; Kirkland, Larry V. ; Wright, R. Glenn ; Zgol, Marek ; Adebimpe, David

fYear

2002

fDate

2002

Firstpage

737

Lastpage

744

Abstract

This paper presents unique research efforts related to the use of infrared (IR) laser beams for detecting failures in integrated circuits. The transparency of the silicon substrate of ICs to radiation in the near infrared (NIR) spectrum permits a noninvasive method for imaging the component circuitry of the IC. A laser test fixture consisting of a 1064 nm continuous wave laser, CCD camera, and image acquisition board is used to generate images from flip chip integrated circuits. Multiresolution image processing techniques are then applied to the resulting images to identify potential defects.

Keywords

failure analysis; flip-chip devices; image processing; infrared imaging; integrated circuit testing; laser beam applications; 1064 nm; CCD camera; Si; continuous wave laser; failure detection; flip-chip integrated circuit; image acquisition board; infrared laser beam; multiresolution image processing; near-infrared imaging; noninvasive method; silicon substrate; test fixture; Charge coupled devices; Circuit testing; Fixtures; Infrared detectors; Infrared imaging; Infrared spectra; Integrated circuit testing; Laser beams; Optical imaging; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

AUTOTESTCON Proceedings, 2002. IEEE

ISSN

1080-7725

Print_ISBN

0-7803-7441-X

Type

conf

DOI

10.1109/AUTEST.2002.1047955

Filename

1047955