DocumentCode :
2457045
Title :
Advances in precise positioning using the electrostatic glass motor
Author :
Moser, R. ; Sache, L. ; Cassat, A. ; Bleuler, H. ; Higuchi, T.
Author_Institution :
Lab. of Robotics, Ecole Polytechnique Federale de Lausanne, Switzerland
Volume :
3
fYear :
2003
fDate :
12-16 Oct. 2003
Firstpage :
1684
Abstract :
This paper reports the continuation of the authors work in the field of linear and rotary sub-micrometric positioning using electrostatic glass motors. Electrostatic glass motors, a development where a glass rotor, once polarized using a static electrostatic field, is synchronously following a moving electrostatic field, have been described previously. The potential application to precise positioning was proven feasible and promising. The present report describes a fully operational rotary prototype, featuring remarkable performances. It is shown that sub arc-second positioning is possible in open loop operation, over an infinite operation range and over a very broad speed range. After a brief recapitulation of the propulsion principle, the realized system is presented and characterized, its performance experimentally determined and discussed.
Keywords :
electrostatic motors; glass; machine control; polarisation; position control; rotors; electrostatic glass motor; electrostatic induction; infinite operation range; linear nanometric positioning; linear sub-micrometric positioning; moving electrostatic field; open loop operation; polarised glass rotor; precise positioning; propulsion principle; rotary sub-micrometric positioning; static electrostatic field; sub arc-second positioning; Driver circuits; Electrodes; Electrostatic actuators; Glass; Propulsion; Robots; Rotors; Stators; Synchronous motors; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Industry Applications Conference, 2003. 38th IAS Annual Meeting. Conference Record of the
Print_ISBN :
0-7803-7883-0
Type :
conf
DOI :
10.1109/IAS.2003.1257782
Filename :
1257782
Link To Document :
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