Title :
Vapor Sensing by Means of a ZnO-on-Si Surface Acoustic Wave Resonator
Author :
Martin, S.J. ; Schweizer, K.S. ; Schwartz, S.S. ; Gunshor, R.L.
Keywords :
Acoustic devices; Acoustic sensors; Acoustic waves; Delay lines; Laboratories; Resonance; Resonant frequency; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide;
Conference_Titel :
IEEE 1984 Ultrasonics Symposium
Conference_Location :
Dallas, Texas, USA
DOI :
10.1109/ULTSYM.1984.198291
