DocumentCode :
2457906
Title :
The Microstructural Characteristics of Thin-Film Zinc Oxide for SAW Transducers
Author :
Hickernell, Fred S.
fYear :
1984
fDate :
14-16 Nov. 1984
Firstpage :
239
Lastpage :
242
Keywords :
Crystallization; Optical films; Optical surface waves; Piezoelectric films; Scanning electron microscopy; Sputter etching; Surface acoustic waves; Transducers; Transistors; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
IEEE 1984 Ultrasonics Symposium
Conference_Location :
Dallas, Texas, USA
Type :
conf
DOI :
10.1109/ULTSYM.1984.198297
Filename :
1535237
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2457906
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