DocumentCode
2457906
Title
The Microstructural Characteristics of Thin-Film Zinc Oxide for SAW Transducers
Author
Hickernell, Fred S.
fYear
1984
fDate
14-16 Nov. 1984
Firstpage
239
Lastpage
242
Keywords
Crystallization; Optical films; Optical surface waves; Piezoelectric films; Scanning electron microscopy; Sputter etching; Surface acoustic waves; Transducers; Transistors; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE 1984 Ultrasonics Symposium
Conference_Location
Dallas, Texas, USA
Type
conf
DOI
10.1109/ULTSYM.1984.198297
Filename
1535237
Link To Document