• DocumentCode
    2457906
  • Title

    The Microstructural Characteristics of Thin-Film Zinc Oxide for SAW Transducers

  • Author

    Hickernell, Fred S.

  • fYear
    1984
  • fDate
    14-16 Nov. 1984
  • Firstpage
    239
  • Lastpage
    242
  • Keywords
    Crystallization; Optical films; Optical surface waves; Piezoelectric films; Scanning electron microscopy; Sputter etching; Surface acoustic waves; Transducers; Transistors; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IEEE 1984 Ultrasonics Symposium
  • Conference_Location
    Dallas, Texas, USA
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1984.198297
  • Filename
    1535237