DocumentCode
2457964
Title
The Acoustic Wave Properties of Thin Film Niobium Pentoxide
Author
Hickernell, Fred S. ; Wagers, Robert S.
fYear
1984
fDate
14-16 Nov. 1984
Firstpage
253
Lastpage
257
Keywords
Acoustic waves; Dispersion; Niobium compounds; Optical films; Piezoelectric films; Sputtering; Substrates; Surface acoustic waves; Transducers; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE 1984 Ultrasonics Symposium
Conference_Location
Dallas, Texas, USA
Type
conf
DOI
10.1109/ULTSYM.1984.198300
Filename
1535240
Link To Document