Title :
The Acoustic Wave Properties of Thin Film Niobium Pentoxide
Author :
Hickernell, Fred S. ; Wagers, Robert S.
Keywords :
Acoustic waves; Dispersion; Niobium compounds; Optical films; Piezoelectric films; Sputtering; Substrates; Surface acoustic waves; Transducers; Transistors;
Conference_Titel :
IEEE 1984 Ultrasonics Symposium
Conference_Location :
Dallas, Texas, USA
DOI :
10.1109/ULTSYM.1984.198300