Title :
On the use of an oscillation-based test methodology for CMOS micro-electro-mechanical systems
Author :
Beroulle, V. ; Bertrand, Y. ; Latorre, L. ; Nouet, P.
Author_Institution :
LIRMM, Univ. of Montpellier, France
Abstract :
This paper introduces the use of the oscillation test technique for MEMS testing. This well-known test technique is here adapted to MEMS. Its efficiency is evaluated based on a case study: A CMOS electromechanical magnetometer.
Keywords :
CMOS integrated circuits; circuit oscillations; integrated circuit testing; magnetometers; microsensors; CMOS electromechanical magnetometer; MEMS testing; oscillation test; Circuit faults; Circuit testing; Magnetic field induced strain; Magnetic sensors; Magnetometers; Microelectromechanical systems; Micromechanical devices; Semiconductor device modeling; Structural beams; System testing;
Conference_Titel :
Design, Automation and Test in Europe Conference and Exhibition, 2002. Proceedings
Print_ISBN :
0-7695-1471-5
DOI :
10.1109/DATE.2002.998476
