DocumentCode :
2458640
Title :
Preparation of soft magnetic Fe-N films by ion beam deposition method with strict control of plasma potental
Author :
Nakagawa, S. ; Hamaguchi, T. ; Naoe, M.
Author_Institution :
Tokyo Institute of Technology
fYear :
1992
fDate :
13-16 April 1992
Firstpage :
351
Lastpage :
351
Keywords :
Crystallography; Ion beams; Iron; Kinetic energy; Magnetic films; Magnetic properties; Plasma sources; Soft magnetic materials; Substrates; X-ray diffraction;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Magnetics Conference, 1992. Digests of Intermag '92., International
Conference_Location :
St. Louis, MO, USA
Print_ISBN :
0-7803-0637-6
Type :
conf
DOI :
10.1109/INTMAG.1992.696534
Filename :
696534
Link To Document :
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