Title :
Acoustic Interference Microscopes with Electrical Mixing Method for Reflection Mode
Author :
Chubachi, N. ; Sannomiya, T.
Keywords :
Acoustic measurements; Acoustic reflection; Acoustic transducers; Interference; Microscopy; Optical reflection; Phase shifters; Surface acoustic waves; Surface topography; Velocity measurement;
Conference_Titel :
IEEE 1984 Ultrasonics Symposium
Conference_Location :
Dallas, Texas, USA
DOI :
10.1109/ULTSYM.1984.198370
