Title :
Direct-write printing of an RF-MEMS Cantilever
Author :
Md Numan-Al-Mobin, A. ; Shankar, Raji ; Cross, W.M. ; Kellar, J. ; Whites, Keith ; Anagnostou, Dimitris
Author_Institution :
South Dakota Sch. of Mines & Technol., Rapid City, SD, USA
Abstract :
This paper presents the manufacturing of a simple RF MEMS cantilever ohmic contact switch using only a custom made silver nanoparticulate ink and PMMA [poly(methyl methacrylate)]. The manufacturing is additive in nature and only the PMMA layer is subtractive. The MEMS switch is printed on Kapton substrate using an Optomec Aerosol Jet printer. Then, it is cured at 200°C. Finally it is soaked in chloroform to remove the PMMA layer and complete the process. The printed MEMS were tested successfully and results are presented here.
Keywords :
aerosols; cantilevers; curing; ink; ink jet printing; microswitches; nanostructured materials; ohmic contacts; polymers; production testing; rapid prototyping (industrial); silver; three-dimensional printing; Ag; Kapton substrate; PMMA layer; additive; additive manufacturing; chloroform; curing; custom made silver nanoparticulate ink; direct-write printing; optomec aerosol jet printer; poly(methyl methacrylate); production testing; simple printed RF MEMS cantilever ohmic contact switch; temperature 200 degC; Electrodes; Ink; Micromechanical devices; Printing; Radio frequency; Silver; Switches; Direct-Write; Flexible Electronics; RF MEMS;
Conference_Titel :
Antennas and Propagation Society International Symposium (APSURSI), 2014 IEEE
Conference_Location :
Memphis, TN
Print_ISBN :
978-1-4799-3538-3
DOI :
10.1109/APS.2014.6904339
