DocumentCode :
2459556
Title :
Nondestructive Observation of Defects in Semiconductors with Photoacoustic and Photothermal-Radiation Microscopes
Author :
Mikoshiba, N. ; Nakamura, H. ; Tsubouchi, K.
fYear :
1984
fDate :
14-16 Nov. 1984
Firstpage :
651
Lastpage :
655
Keywords :
Acoustic signal detection; Face detection; Gallium arsenide; Infrared detectors; Microscopy; Optical surface waves; Radiation detectors; Semiconductor radiation detectors; Surface emitting lasers; Surface topography;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
IEEE 1984 Ultrasonics Symposium
Conference_Location :
Dallas, Texas, USA
Type :
conf
DOI :
10.1109/ULTSYM.1984.198379
Filename :
1535319
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2459556
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