DocumentCode
2460448
Title
Characterization of RIE Induced Radiation Damage in Silicon Using Nondestructive Transverse Acoustoelectric Voltage Measurements
Author
Tabib-Azar, M. ; Liu, T. ; Abedin, M.N. ; Das, P. ; Gilboa, H. ; Hata, W. ; Donnell, K. O´
fYear
1984
fDate
14-16 Nov. 1984
Firstpage
926
Lastpage
929
Keywords
Capacitance-voltage characteristics; Cathodes; Dry etching; Fabrication; Ion beams; Magnetic fields; Silicon; Surface acoustic waves; Voltage measurement; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE 1984 Ultrasonics Symposium
Conference_Location
Dallas, Texas, USA
Type
conf
DOI
10.1109/ULTSYM.1984.198438
Filename
1535378
Link To Document