Title :
Scanning X-ray interferometry over a millimeter baseline
Author :
Bergamin, A. ; Cavagnero, G. ; Cordiali, L. ; Mana, G. ; Zosi, G.
Author_Institution :
Istituto di Metrol., CNR, Torino, Italy
Abstract :
A new translation device has been developed at the IMGC to improve the measurement of the
Keywords :
X-ray crystallography; electromagnetic wave interferometry; elemental semiconductors; lattice constants; physical instrumentation control; position control; servomechanisms; silicon; 2 mm; Si; crystal position; lattice spacing; linear displacement; maximum crystal movement; millimeter baseline; nanoradian resolutions; scanning X-ray interferometry; servo controls; translation device; Attitude control; Crystals; Fasteners; Finite element methods; Lattices; Machining; Millimeter wave devices; Optical interferometry; Servosystems; Silicon;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 1996 Conference on
Conference_Location :
Braunschweig, Germany
Print_ISBN :
0-7803-3376-4
DOI :
10.1109/CPEM.1996.547169
