Title :
SAW filters using ZnO thin films
Author :
Kirk, David M. ; Kuramoto, Ken
Author_Institution :
Murata Erie North America, Inc., Smyrna, GA, USA
Abstract :
Surface acoustic wave (SAW) filters using ZnO thin films are discussed. These films have a low dielectric constant and low temperature coefficients, but stability and producibility of the films are a concern. Some fabrication techniques for the films are described, and packaging and reliability of the filters are discussed. SAW filters with 1.5 to 2 GHz center frequency are reported
Keywords :
microwave filters; passive filters; piezoelectric materials; surface acoustic wave devices; zinc compounds; 1.5 to 2 GHz; SAW filters; ZnO thin films; dielectric constant; fabrication techniques; packaging; producibility; reliability; stability; temperature coefficients; Acoustic waves; Dielectric constant; Dielectric thin films; Fabrication; SAW filters; Stability; Surface acoustic waves; Temperature; Transistors; Zinc oxide;
Conference_Titel :
Electronics Components Conference, 1988., Proceedings of the 38th
Conference_Location :
Los Angeles, CA
DOI :
10.1109/ECC.1988.12580
