DocumentCode

2461666

Title

High Coupling and High Velocity SAW Using a ZnO/AlN/Glass Substrate

Author

Shiosaki, T. ; Mikamura, Y. ; Takeda, F. ; Kawabata, A.

fYear

1985

fDate

16-18 Oct. 1985

Firstpage

186

Lastpage

191

Keywords

Aluminum; Ceramics; Etching; Glass; Piezoelectric films; Sputtering; Substrates; Surface acoustic waves; Temperature; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

IEEE 1985 Ultrasonics Symposium

Conference_Location

San Francisco, CA, USA

Type

conf

DOI

10.1109/ULTSYM.1985.198501

Filename

1535441