Title :
High Coupling and High Velocity SAW Using a ZnO/AlN/Glass Substrate
Author :
Shiosaki, T. ; Mikamura, Y. ; Takeda, F. ; Kawabata, A.
Keywords :
Aluminum; Ceramics; Etching; Glass; Piezoelectric films; Sputtering; Substrates; Surface acoustic waves; Temperature; Zinc oxide;
Conference_Titel :
IEEE 1985 Ultrasonics Symposium
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/ULTSYM.1985.198501
