Title :
Low Temperature Growth of Epitaxial AlN Films on Sapphire
Author :
Sato, Kazuo ; Umino, Shun-ichi ; Tsubouchi, Kazuo ; Mikoshiba, Nobuo
Keywords :
Inductors; MOCVD; Plasma temperature; Reproducibility of results; Rough surfaces; Semiconductor films; Substrates; Surface morphology; Surface roughness; Thermal stresses;
Conference_Titel :
IEEE 1985 Ultrasonics Symposium
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/ULTSYM.1985.198502
