DocumentCode
2461677
Title
Low Temperature Growth of Epitaxial AlN Films on Sapphire
Author
Sato, Kazuo ; Umino, Shun-ichi ; Tsubouchi, Kazuo ; Mikoshiba, Nobuo
fYear
1985
fDate
16-18 Oct. 1985
Firstpage
192
Lastpage
197
Keywords
Inductors; MOCVD; Plasma temperature; Reproducibility of results; Rough surfaces; Semiconductor films; Substrates; Surface morphology; Surface roughness; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE 1985 Ultrasonics Symposium
Conference_Location
San Francisco, CA, USA
Type
conf
DOI
10.1109/ULTSYM.1985.198502
Filename
1535442
Link To Document