Title :
IDT-Generated Ultrasonic Lamb Waves in a Very Thin Membrane
Author :
Uozumi, K. ; White, R.M. ; Mulle, R.S.
Keywords :
Acoustic waves; Biomembranes; Delay lines; Frequency; Oscillators; Physics; Silicon; Sputter etching; Transducers; Zinc oxide;
Conference_Titel :
IEEE 1985 Ultrasonics Symposium
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/ULTSYM.1985.198506
