Title :
Recent Advances in Subminiature/Thin Membrane Resonators
Keywords :
Bars; Biomembranes; Chemicals; Crystalline materials; Etching; Lithium compounds; Lithium niobate; Milling; Resonant frequency; Temperature;
Conference_Titel :
IEEE 1985 Ultrasonics Symposium
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/ULTSYM.1985.198521
