Title :
On the Reduction in Quality Factor of the Piezoelectric Thin Film on Semiconductor Composite Resonator Due to Radiation Into the Bulk Semiconductor
Author :
Stevens, D.S. ; Tiersten, H.F. ; Shick, D.V.
Keywords :
Cutoff frequency; Electrodes; Etching; Gallium arsenide; III-V semiconductor materials; Piezoelectric films; Q factor; Resonance; Semiconductivity; Semiconductor films;
Conference_Titel :
IEEE 1985 Ultrasonics Symposium
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/ULTSYM.1985.198524
