DocumentCode :
2462237
Title :
Temperature Compensated ZnO/SiO2/Si Thin Film Resonator for VHF Voltage Controlled Oscillator
Author :
Miyasaka, Yoichi ; Hoshino, Shigeki ; Takahashi, Sadayuki
fYear :
1985
fDate :
16-18 Oct. 1985
Firstpage :
346
Lastpage :
351
Keywords :
Biomembranes; Electrodes; Resonance; Semiconductor thin films; Sputter etching; Substrates; Surface acoustic waves; Temperature; Voltage-controlled oscillators; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
IEEE 1985 Ultrasonics Symposium
Conference_Location :
San Francisco, CA, USA
Type :
conf
DOI :
10.1109/ULTSYM.1985.198530
Filename :
1535470
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2462237
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