Title :
Nondestructive Observation of Microdefects in GaAs by Photo-Thermal-Radiation Technique
Author :
Mikoshiba, N. ; Nakamura, H. ; Tsubouchi, K.
Keywords :
Chemicals; Etching; Filters; Gallium arsenide; Infrared detectors; Optical surface waves; Surface emitting lasers; Temperature sensors; Transmission electron microscopy; Wavelength measurement;
Conference_Titel :
IEEE 1985 Ultrasonics Symposium
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/ULTSYM.1985.198547