DocumentCode :
2462630
Title :
Nondestructive Observation of Microdefects in GaAs by Photo-Thermal-Radiation Technique
Author :
Mikoshiba, N. ; Nakamura, H. ; Tsubouchi, K.
fYear :
1985
fDate :
16-18 Oct. 1985
Firstpage :
436
Lastpage :
439
Keywords :
Chemicals; Etching; Filters; Gallium arsenide; Infrared detectors; Optical surface waves; Surface emitting lasers; Temperature sensors; Transmission electron microscopy; Wavelength measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
IEEE 1985 Ultrasonics Symposium
Conference_Location :
San Francisco, CA, USA
Type :
conf
DOI :
10.1109/ULTSYM.1985.198547
Filename :
1535487
Link To Document :
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