DocumentCode :
2462641
Title :
Transformation of axial vacuum-arc plasma flows into radial streams and their use in coating deposition processes
Author :
Aksenov, I.I. ; Khoroshikh, V.M. ; Lomino, N.S. ; Ovcharenko, V.O. ; Zadneprovskij, Yu.A.
Author_Institution :
Nat. Sci. Center, Kharkov Inst. of Phys. & Technol., Ukraine
Volume :
2
fYear :
1998
fDate :
17-21 Aug 1998
Firstpage :
566
Abstract :
Radial filtered plasma flow formation in the annular gap between two oppositely directed rectilinear vacuum-arc erosion-plasma sources with magnetic focusing has been investigated. Studies were made into the impact of the parameters of the system (magnetic fields, substrate position) on the ion flow density and deposition rate distributions across the outlet annular opening between the anodes, and also on the roughness of the coatings obtained. As a result, the experiments have given the conditions which provide for coating deposition at a uniform rate over the whole width of the annular substrate surface with minimum plasma losses in the process of transformation of axial plasma flows into radial streams
Keywords :
anodes; plasma deposited coatings; plasma deposition; plasma flow; vacuum arcs; annular gap; anodes; axial vacuum-arc plasma flow transformation; coating deposition processes; coating deposition rate; coatings roughness; deposition rate distributions; ion flow density; magnetic fields; magnetic focusing; minimum plasma losses; outlet annular opening; radial filtered plasma flow formation; radial streams; rectilinear vacuum-arc erosion-plasma sources; substrate position; Anodes; Cathodes; Coatings; Coils; Magnetic separation; Plasma displays; Plasma materials processing; Plasma sources; Plasma transport processes; Solenoids;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Discharges and Electrical Insulation in Vacuum, 1998. Proceedings ISDEIV. XVIIIth International Symposium on
Conference_Location :
Eindhoven
ISSN :
1093-2941
Print_ISBN :
0-7803-3953-3
Type :
conf
DOI :
10.1109/DEIV.1998.738721
Filename :
738721
Link To Document :
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