Title :
Pyroelectric Properties and Applications of Sputtered Zinc-Oxide Thin Films
Author :
Polla, D.L. ; Muller, R.S. ; White, R.M.
Keywords :
Chemical sensors; Electrodes; Pyroelectricity; Sensor arrays; Sputtering; Surface acoustic waves; Temperature sensors; Thin film sensors; Voltage; Zinc oxide;
Conference_Titel :
IEEE 1985 Ultrasonics Symposium
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/ULTSYM.1985.198559