DocumentCode :
2462843
Title :
Pyroelectric Properties and Applications of Sputtered Zinc-Oxide Thin Films
Author :
Polla, D.L. ; Muller, R.S. ; White, R.M.
fYear :
1985
fDate :
16-18 Oct. 1985
Firstpage :
495
Lastpage :
498
Keywords :
Chemical sensors; Electrodes; Pyroelectricity; Sensor arrays; Sputtering; Surface acoustic waves; Temperature sensors; Thin film sensors; Voltage; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
IEEE 1985 Ultrasonics Symposium
Conference_Location :
San Francisco, CA, USA
Type :
conf
DOI :
10.1109/ULTSYM.1985.198559
Filename :
1535499
Link To Document :
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