DocumentCode
2462847
Title
A simple method of enhancing magnetic filter efficiency
Author
Gidalevich, E. ; Boxman, R.L. ; Goldsmith, S.
Author_Institution
Electr. Discharge & Plasma Lab., Tel Aviv Univ., Israel
Volume
2
fYear
1998
fDate
17-21 Aug 1998
Firstpage
581
Abstract
In filtered vacuum arc deposition, the plasma produced by spots is passed through a curved duct by means of a magnetic field, in order to remove macroparticles which would otherwise contaminate the deposition. In this paper, it is suggested that the plasma throughput efficiency in such a magnetic filter may be enhanced by locating the plasma source (e.g. the vacuum arc cathode) in the free-passage zone at the duct entrance
Keywords
cathodes; filters; magnetic devices; plasma deposited coatings; plasma deposition; vacuum arcs; curved duct; deposition contamination; duct entrance; filtered vacuum arc deposition; free-passage zone; macroparticles removal; magnetic field; magnetic filter efficiency enhancement; plasma coating processes; plasma source location; plasma throughput efficiency; vacuum arc cathode; Cathodes; Ducts; Electrons; Filters; Frequency; Magnetic flux; Magnetic separation; Plasma sources; Toroidal magnetic fields; Vacuum arcs;
fLanguage
English
Publisher
ieee
Conference_Titel
Discharges and Electrical Insulation in Vacuum, 1998. Proceedings ISDEIV. XVIIIth International Symposium on
Conference_Location
Eindhoven
ISSN
1093-2941
Print_ISBN
0-7803-3953-3
Type
conf
DOI
10.1109/DEIV.1998.738731
Filename
738731
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