Title :
A simple method of enhancing magnetic filter efficiency
Author :
Gidalevich, E. ; Boxman, R.L. ; Goldsmith, S.
Author_Institution :
Electr. Discharge & Plasma Lab., Tel Aviv Univ., Israel
Abstract :
In filtered vacuum arc deposition, the plasma produced by spots is passed through a curved duct by means of a magnetic field, in order to remove macroparticles which would otherwise contaminate the deposition. In this paper, it is suggested that the plasma throughput efficiency in such a magnetic filter may be enhanced by locating the plasma source (e.g. the vacuum arc cathode) in the free-passage zone at the duct entrance
Keywords :
cathodes; filters; magnetic devices; plasma deposited coatings; plasma deposition; vacuum arcs; curved duct; deposition contamination; duct entrance; filtered vacuum arc deposition; free-passage zone; macroparticles removal; magnetic field; magnetic filter efficiency enhancement; plasma coating processes; plasma source location; plasma throughput efficiency; vacuum arc cathode; Cathodes; Ducts; Electrons; Filters; Frequency; Magnetic flux; Magnetic separation; Plasma sources; Toroidal magnetic fields; Vacuum arcs;
Conference_Titel :
Discharges and Electrical Insulation in Vacuum, 1998. Proceedings ISDEIV. XVIIIth International Symposium on
Conference_Location :
Eindhoven
Print_ISBN :
0-7803-3953-3
DOI :
10.1109/DEIV.1998.738731
