DocumentCode :
2462867
Title :
Fabrication of graphene MEMS by standard transfer: High performance atomic force microscope tips
Author :
Fei Hui ; Porti, Marc ; Nafria, Montserrat ; Huiling Duan ; Lanza, Mario
Author_Institution :
Inst. of Functional Nano & Soft Mater., Soochow Univ., Suzhou, China
fYear :
2015
fDate :
11-13 Feb. 2015
Firstpage :
1
Lastpage :
4
Abstract :
Scanning probe microscopes (SPM) are commonly used for characterization of the topographic and electrical properties of materials at the nanoscale. In such setup, the probes play a prominent role to obtain reliable imaging, but most tips lose their intrinsic properties after some measurements. Here, we modified the metal varnished atomic force microscope tips by transferring a sheet of graphene on them. The resulting graphene micro-electromechanical system (MEMS) - AFM tips are characterized by means of optical microscope, scanning electron microscope (SEM), energy dispersive X-ray microscope (EDX) and atomic force microscope (AFM). Our graphene-coated tips achieved lifetimes 10 times larger than the uncoated counterparts, improving the quality and reducing the cost of research.
Keywords :
X-ray chemical analysis; atomic force microscopy; graphene devices; micromechanical devices; AFM tips; C; EDX; SPM; electrical properties; energy dispersive X-ray microscope; graphene MEMS; graphene-coated tips; intrinsic properties; metal varnished atomic force microscope tips; microelectromechanical system; optical microscope; scanning probe microscopes; standard transfer; topographic properties; Atomic layer deposition; Coatings; Copper; Current measurement; Mechanical factors; Micromechanical devices; Reliability; atomic force microscope tips; graphene; longer lifetime; low cost; standard transfer;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices (CDE), 2015 10th Spanish Conference on
Conference_Location :
Madrid
Type :
conf
DOI :
10.1109/CDE.2015.7087444
Filename :
7087444
Link To Document :
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