Title :
The calculations of surface structures of the thin film being applied by method of ionic condensation
Author :
Kostyuk, G.I. ; Levchenko, L.G.
Author_Institution :
Kharkov Aviation Inst., Ukraine
Abstract :
Precomputations have demonstrated the basic opportunity of plasma oscillations use for film surface relief creation at the stage of condensation that presents practical interest in connection with the unusual opportunities of the given method. Besides the use of nonstationary plasma oscillations (and also of voltage frequencies) doubtless opens series a additional opportunities. It is necessary to note that the calculations of condensation in the structures of complex forms may be produced; in this case, the drift of frequencies is the main control parameter
Keywords :
condensation; plasma deposited coatings; plasma deposition; plasma oscillations; surface structure; surface topography; thin films; complex form structures; film surface relief creation; frequencies drift; ionic condensation method; nonstationary plasma oscillations; plasma oscillations; thin film deposition; voltage frequencies; Absorption; Art; Equations; Ion beams; Mathematical model; Plasmas; Substrates; Surface structures; Transistors; Voltage;
Conference_Titel :
Discharges and Electrical Insulation in Vacuum, 1998. Proceedings ISDEIV. XVIIIth International Symposium on
Conference_Location :
Eindhoven
Print_ISBN :
0-7803-3953-3
DOI :
10.1109/DEIV.1998.738733
