Title :
SAW Accelerometers: Integration of Thick and Thin Film Technologies
Author :
Bonbrake, Tim B. ; Erikson, Carl A., Jr. ; Thoma, Dennis
Keywords :
Accelerometers; Assembly; Circuits; Delay lines; Electronics packaging; Fabrication; Surface acoustic waves; Testing; Transistors; Tuning;
Conference_Titel :
IEEE 1985 Ultrasonics Symposium
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/ULTSYM.1985.198578
